目錄······1

1 總 則······12

2 術(shù) 語······13

3 基本規(guī)定······14

4 工 藝······15

4.1 一般規(guī)定······15

4,2 基本工序與生產(chǎn)協(xié)作······15

4.3 工藝區(qū)劃······16

4,4 設(shè)備布置······16

5 總 圖······17

5.1 廠址選擇······17

5,2 總平面布置······17

6 建 筑······19

6,1 一般規(guī)定······19

6.2 防火及安全疏散······19

7 結(jié) 構(gòu)······21

7.1 一般規(guī)定······21

7.2 結(jié)構(gòu)設(shè)計(jì)······21

8 動力及氣體工程······23

8,1 冷熱源······23

8.2 大宗氣體供應(yīng)······24

8.3 特種氣體供應(yīng)······25

8.4 動力氣體供應(yīng)······27

9 供暖、通風(fēng)、空氣調(diào)節(jié)與凈化······29

9.1 一般規(guī)定······29

9.2 供暖、通風(fēng)與廢氣處理······29

9.3 空氣調(diào)節(jié)與凈化······31

9.4 防排煙······32

10 給水排水······33

10.1 一般規(guī)定······33

10.2 一般給水排水······33

10.3 純水······34

10.4 工藝?yán)鋮s循環(huán)水······34

lO.5 廢水處理······35

10.6 消防······35

11 電 氣······37

l1.l 供配電與照明······37

11.2 防雷與接地······38

11.3 白控······38

11.4 通信······39

11,5 安全防護(hù)······39

12 防靜電······41

12.1 一般規(guī)定······41

12.2 防靜電措施······41

12.3 防靜電接地······43

13 空間管理······44

13.1 一般規(guī)定······44

13.2 管線布置······44

附錄A 發(fā)光二極管典型生產(chǎn)環(huán)境要求······46

附錄B 發(fā)光二極管生產(chǎn)工藝動力品質(zhì)要求······47

附錄C 發(fā)光二極管生產(chǎn)的典型工藝流程······49

本規(guī)范用詞說明······51

引用標(biāo)準(zhǔn)名錄······52

附:條文說明······54

1 總 則······60

2 術(shù) 語······61

3 基本規(guī)定······62

4 工 藝······63

4,1 一般規(guī)定······63

4.2 基本工序與生產(chǎn)協(xié)作······64

4.3 工藝區(qū)劃······64

4.4 設(shè)備布置······65

5 總 圖······66

5.1 廠址選擇······66

5.2 總平面布置······67

6 建 筑······68

6.1 一般規(guī)定······68

6.2 防火及安全疏散······69

7 結(jié) 構(gòu)······72

7.1 一般規(guī)定······72

7,2 結(jié)構(gòu)設(shè)計(jì)······72

8 動力及氣體工程······74

8.1 冷熱源······74

8.2 大宗氣體供應(yīng)······75

8.3 特種氣體供應(yīng)······76

8.4 動力氣體供應(yīng)······78

9 供暖、通風(fēng)、空氣調(diào)節(jié)與凈化······80

9.1 一般規(guī)定······80

9.2 供暖、通風(fēng)與廢氣處理······80

9.3 空氣調(diào)節(jié)與凈化······82

9,4 防排煙······83

10 給水排水······85

10.1 一般規(guī)定······85

10.2 一般給水排水······85

10.3 純水······87

10.4 工藝?yán)鋮s循環(huán)水······87

10.5 廢水處理······88

10.6 消防······88

11 電 氣······89

11.1 供配電與照明······89

11.2 防雷與接地······91

11.4 通信······91

11.5 安全防護(hù)······91

12 防靜電······94

12.1 一般規(guī)定······94

12,2 防靜電措施······95

12.3 防靜電接地······96

13 空間管理······97

13.l 一般規(guī)定······97

13.2 管線布置······97